INTECIN 20395
INSTITUTO DE TECNOLOGIAS Y CIENCIAS DE LA INGENIERIA "HILARIO FERNANDEZ LONG"
Unidad Ejecutora - UE
congresos y reuniones científicas
Título:
Electrical Characterization of Defects created by gamma irradiation in HfO2 based MIS Structures
Autor/es:
F. CAMPABADAL; A. FAIGON; M. GONZALES, M. ACERO; L. SAMBUCCO SALOMONE; H. GARCIA, H. CASTÁN, S. DUEÑAS
Lugar:
Valladolid
Reunión:
Conferencia; 17th Conference on Defects-Recognition, Imaging and Physics in Semiconductors; 2017
Institución organizadora:
DRIP-Universidad de Valladolid
Resumen:
In this work we present an electrical study on the effects of gamma irradiation on the electrical properties of Ni/HfO2/n-Si MIS structures. The 20 nm high-k insulator was deposited by atomic layer deposition (ALD) technique. The capacitors were subjected to irradiations from 16 to 386 kGy.Flat band shifts, hysteresis in the C-V curves and leakage currents were monitored. An analysis of interface state creation is carried out.
