An Optimization-based Framework for the scheduling of Automated Manufacturing Systems

AGUIRRE, ADRIÁN MARCELO; MÉNDEZ, CARLOS ALBERTO; DE PRADA, CESAR

Advanced Control of Chemical Processes

International Federation of Automatic Control - IFAC Proceedings Volumes (IFAC-PapersOnline)

Año: 2012; p. 780 - 785

Abstract: Automated Wet-Etch Station (AWS) is a complex flow shop operation process in Semiconductor Manufacturing Systems. In this station, automated material-handling robots are used to transferring jobs across a lineal configuration of chemical and water baths. In every bath, limited processing times and complex storage policies must be assured. In this work, an optimization-based framework is developed to improve the operations of AWS. To do this, a sequential procedure based on mixed-integer linear programming (MILP) formulations is proposed. The aim of this work is to provide a suitable approach that generates near-optimal results to industrial AWS scheduling problems in reasonable CPU time.