INTEC   05402
INSTITUTO DE DESARROLLO TECNOLOGICO PARA LA INDUSTRIA QUIMICA
Unidad Ejecutora - UE
capítulos de libros
Título:
AN OPTIMIZATION AND SIMULATION APPROACH FOR INDUSTRIAL-SCALE SCHEDULING PROBLEMS IN SEMICONDUCTOR MANUFACTURING SYSTEMS
Autor/es:
AGUIRRE, ADRIÁN MARCELO; CAFARO, VANINA GUADALUPE; MÉNDEZ, CARLOS ALBERTO; CASTRO, PEDRO M.
Libro:
Proceedings of the European Modeling & Simulation Symposium (Simulation in industry)
Editorial:
A. Bruzzone, M.A. Piera, F. Longo, P. Elfrey, M. Affenzeller and O. Balci
Referencias:
Lugar: Roma; Año: 2011; p. 384 - 393
Resumen:
Automated Wet-etch Station (AWS) is a critical stage in Semiconductor Manufacturing Systems (SMS). This station represents a complex flowshop operation system in which semiconductor wafer´s lots have to be processed and transferred throughout sequential stages by using automated transportation devices. In this work a novel optimization and simulation approach is developed for the efficient operation of processing modules and transportation devices in the AWS. Principal templates and tools available in the Arena® simulation software were used to represent the real behaviour of this complex manufacturing process. Also, an advanced internal logic for transportation devices was modelled in order to ensure feasible results of this highly-constrained problem. The principal aim of this work is to provide a systematic computer-aided tool to improve the dynamic operation of this critical manufacturing station. The proposed model allows easily evaluating and validating the feasibility of different schedules, identifying the possible sources of infeasibility to be corrected.