INTEC 05402
INSTITUTO DE DESARROLLO TECNOLOGICO PARA LA INDUSTRIA QUIMICA
Unidad Ejecutora - UE
congresos y reuniones científicas
Título:
Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
Autor/es:
PÉREZ, MARÍA CECILIA ; SASSETTI, FERNANDO LIONEL; GUARNIERI, FABIO ARIEL
Lugar:
La Habana
Reunión:
Congreso; V Congreso Latinoamericano de Ingeniería Biomédica (CLAIB2011); 2011
Institución organizadora:
CORAL - Consejo Regional de Ingeniería Biomédica para América Latina
Resumen:
The modeling and fabrication of a planar microinductor were presented. This microinductor is going to be used in telemetry systems supplying energy to miniaturized implants. First, a model for the electrical characteristics of planar coils will be discussed. Parasitic electrical effects were evaluated. Fabrication process of planar microcoils was described. Different configurations of planar microinductor with the use of micromachining technologies such as thin film deposition, standard photolithography processes and electroplating were made. Inductor parameters were evaluated by electrical measurements in DC. Measurements of calculated and measured values allow the manufacturing process validation.
