Monte Carlo model for the deposition of electronic energy in solid argon thin films by keV electrons

R. VIDAL; R. A. BARAGIOLA; J. FERRÓN

JOURNAL OF APPLIED PHYSICS

American Institute of Physics

Año: 1996 vol. 80 p. 5653 - 5658

0021-8979

The motion of keV electrons in a film of solid argon and the depth distribution of ionizations andexcitations are studied using a Monte Carlo simulation. This method does not only allow foraccurate inclusion of individual cross sections but also for easy inclusion of finite size effects. Wehave analyzed the effect of the substrate on electron trajectories and found an importantenhancement of the number of electron–hole pairs and excitons produced near the interface byelectrons reflected from heavy substrates.