Chemical reactions at surfaces: titanium oxidation

I. VAQUILA; L.I. VERGARA; M.C. PASSEGGI (H); R. VIDAL; J. FERRÓN

SURFACE AND COATINGS TECHNOLOGY

Elsevier

Año: 1999 vol. 122 p. 67 - 71

0257-8972

Auger electron spectroscopy has been used to study the first stages of titanium oxidation. Titanium at room and high temperature, as well as thin films deposited over a metal substrate, were oxidized at low pressure. The authors found, using factor analysis, two different regimes depending on the sample temperature. For temperatures below 200°C the oxidation is characterized by the presence of only one oxide phase: TiO2. At higher temperatures, the presence of Ti2O3 is detected from the beginning of the process. For thin films [less than one monolayer (ML)] only TiO2 was found, but for thicker films a new oxide phase is detected (TiOx, x<2). Finally, for thicknesses >7ML, only TiO2 is detected.