INVESTIGADORES
VIDAL ricardo Alberto
artículos
Título:
Monte Carlo model for electronically stimulated sputtering of thin films of solid argon
Autor/es:
R. VIDAL; J. FERRÓN; R. A. BARAGIOLA
Revista:
AIP CONFERENCE PROCEEDINGS
Editorial:
AIP
Referencias:
Año: 1996 vol. 378 p. 587 - 592
ISSN:
0094-243X
Resumen:
In the present work we use a Monte Carlo code to simulate the motionof a keV electron in a film of solid argon and to compute the depth distribution ofionizations. The advantage of this approach is that finite size effects can easily beincorporated in the model. Particularly we have analyzed substrate effects andevaluated the enhancement of the sputtering yield produced by electrons reflectedat the substrate.
