Simulation of a Silicon CVD Spouted Fluidized Bed Reactor

PIÑA, JULIANA; SCHBIB, SUSANA NOEMÍ; BUCALÁ, VERÓNICA; EGE, PAUL; DE LASA, HUGO IGNACIO

Vancouver, Canadá

Conferencia; Fluidization XII: New Horizons in Fluidization Engineering; 2007

University of Western Ontario, University of British Columbia, University of Saskatchewan

A comprehensive multiphase gas-solid mathematical model that successfully describes the batch growth of silicon particles in a chemical vapor deposition (CVD) submerged spouted bed reactor is extended to simulate semibatch operations with periodic seeds additions and product extractions. This model takes into account the fluidized bed reactor as well as a population balance equation representing particle growth and agglomeration. Experimental data obtained from semi-batch operation in a pilot scale reactor at REC Silicon Inc. are used to evaluate the proposed mathematical model.