A numerical simulation benchmark of tilt scanning interferometry for 3D metrology

GALIZZI, G. E.; RUIZ, PABLO D.; KAUFMANN, G. H.

Stuttgart, Germany

Congreso; Fringe 2009; 2009

Stuttgart University

Tilt scanning interferometry (TSI) is a newly developed experimental technique used to determine multi-component displacement fields inside semitransparent scattering materials. It can be considered as an extension of speckle interferometry in 3D, in which the illumination angle is tilted to provide depth information, or as an optical diffraction tomography technique with phase detection. In this paper, we present a numerical model to simulate the speckle fields recorded in TSI. The model is an extension of a one recently developed  and allows the separation of all the different effects that affect the phase measurements, which may lead to spurious displacements.