Valved molecular beam skimmer

ERNESTO MARCECA; JÖRG BECKER; FRIEDRICH HENSEL

REVIEW OF SCIENTIFIC INSTRUMENTS

American Institute of Physics

Año: 1997 vol. 68 p. 3258 - 3259

0034-6748

Under routine source conditions, the optimum nozzle-skimmer distance to achieve maximum molecular beam intensities is within the range of a few millimeters. In cases where double skimming is additionally required, the distance between the skimmers should be kept small in order to sample a sufficiently large solid angle of the beam and hence maintain a good enough intensity. These two facts make it normally difficult to isolate the first from the second expansion chamber using a commercial vacuum gate valve due to the lack of remaining space. This note presents the design of a vacuum-tight valve which allows the aperture of a skimmer to be closed by plugging a needle directly against its internal conical wall. The valve can be driven manually or pneumatically from outside the vacuum chamber. The helium conductance of the valve was measured to be better than 1 × 10–8 mbar × l × s – 1 for a helium partial pressure difference of 1 bar.