INVESTIGADORES
IEMMI Claudio Cesar
congresos y reuniones científicas
Título:
Design of a phase shifting interferometer in the EUV for high precision metrology
Autor/es:
M. CAPELUTO; M. MARCONI; CLAUDIO IEMMI
Lugar:
Lima
Reunión:
Congreso; RIAO/OPTILAS 2010; 2010
Institución organizadora:
RIAO
Resumen:
We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.
