INVESTIGADORES
IEMMI Claudio Cesar
artículos
Título:
Table Top Nanopatterning with Extreme Ultraviolet laser Illumination
Autor/es:
M. CAPELUTO; P. WACHULAK; M. MARCONI; D. PATEL; C. MENONI; J. ROCCA; CLAUDIO IEMMI; E. ANDERSON; W. CHAO; D. ATTWOOD
Revista:
MICROELECTRONIC ENGINEERING
Editorial:
Elsiever
Referencias:
Año: 2007 vol. 84 p. 721 - 724
ISSN:
0167-9317
Resumen:
Patterning with extreme ultraviolet light generated by a compact, bright laser source operating at a wavelength of 46.9 nm is demonstrated using two complementary approaches: multiple beam interferometric lithography and de-magnifying projection. Features with sizes ranging from 370 nm to 60 nm were printed in a few seconds in poly-methyl methacrylate resist. These proof-of-principle experiments demonstrate practical table-top nanopatterning tools based on extreme ultraviolet lasers for nanotechnology applications.
