INVESTIGADORES
IEMMI Claudio Cesar
artículos
Título:
Design of a phase-shifting interferometer in the extreme ultraviolet for high-precision metrology
Autor/es:
MARÍA GABRIELA CAPELUTO; MARIO MARCONI; CLAUDIO CESAR IEMMI
Revista:
APPLIED OPTICS
Editorial:
OPTICAL SOC AMER
Referencias:
Año: 2014 vol. 53 p. 1274 - 1283
ISSN:
0003-6935
Resumen:
The design of a phase-shift interferometer in the extreme ultraviolet (EUV) is described. The interferometer is expected to achieve a significantly higher precision as compared with similar instruments that utilize lasers in the visible range. The interferometer?s design is specifically adapted for its utilization with a table top pulsed capillary discharge EUV laser. The numerical model evaluates the errors in the interferograms and in the retrieved wavefront induced by the shot-to-shot fluctuations and pointing instabilities of the laser.
