CMOS Integrated Carbon Nanotube Sensor

M.S. PEREZ; B. LERNER; P.D. PAREJA OBREGON; P.M. JULIAN; P.S. MANDOLESI; F.A. BUFFA; A. BOSELLI; A. LAMAGNA

Congreso; International Symposium on Olfaction and Electronic Nose; 2009

Recently carbon nanotubes (CNTs) have been gaining their importance as sensors for gases, temperature and chemicals. Advances in fabrication processes simplify the formation of CNT sensor on silicon substrate. We have integrated single wall carbon nanotubes (SWCNTs) with complementary metal oxide semiconductor process (CMOS) to produce a chip sensor system. The sensor prototype was designed and fabricated using a 0.30 um CMOS process. Themain advantage is that the device has a voltage amplifier so the electrical measure can be taken and amplified inside the sensor. When the conductance of the SWCNTs varies in response to media changes, this is observed as a variation in the output tension accordingly.