Influence of the braking agent on the fabrication of solid state micro and nanopores by wet etching on silicon wafers

ITZEL SANTIZO; MANUEL DER; MILENA VEGA; CARLOS LASORSA; MARINA SIERRA; BETIANA LERNER; EVA MARTÍN DEL VALLE; MAXIMILIANO PÉREZ

Salamanca

Congreso; Congreso Internacional Iberoamericano de Biotecnología BIO. IBEROAMÉRICA 2016; 2016

Univ. Salamanca

In this work, we present results corresponding to the study of the fabrication process of solid state micro and nanopores by wet etching on crystalline silicon wafers. A thorough characterization of the method is performed and the behavior of the attack agent, as well as the action of different braking agents is analyzed under different temperature and voltage conditions. Measurements of temporal evolution of currents, observed for different silicon wafers during the formation process are shown. Different etching stages are recognized and, in order to establish the pore formation time, possible parameters and useful dependences are determined. Also, the fate of the applied potencial during etching process is studied, analysing potencial magnitude affects etching rate, neutralization and pore diameters of pores obtained during the process performance.