A new combined method to make microcavities in Silicon wafer (100)

C. TORO; B .LERNER; M.S. PEREZ; C. LASORSA; C.RINALDI; A.BOSELLI; A.LAMAGNA

Takamatsu

Simposio; Proceedings of LPM2011. The 12th International Symposium on Laser Precision Microfabrication.; 2011

Our contribution is to develop an efficient method for manufacturing micro structures, providinghigh quality, repeatability and optimal use of the microfabrication tools. In this paper we show thefirst results of the control parameters of the geometries and sizes of the micro-and macro-structures,with 90 % repeatability using a nanosecond laser to open a hole over silicon wafer covered with athin film of Si3N4 and applying selective etching of crystalline silicon.