INVESTIGADORES
ALDAO celso Manuel
congresos y reuniones científicas
Título:
The Patterning and Etching of Silicon with Halogens: Atomic-Scale Characterization
Autor/es:
J.H. WEAVER, K.S. NAKAYAMA, G.J. XU, E. GRAUGNARD, B.R. TRENHAILE, Y C.M. ALDAO
Lugar:
Urbana-Champaign, Illinois
Reunión:
Simposio; 25th Annual Symposium on Applied Surface Analysis; 2003
