Pyramidal etch hillocks formation in a Kossell crystal

C.M. ALDAO, M.P. SUÁREZ, Y D.A. MIRABELLA

Islamabad, Pakistan

Simposio; International Mini Symposium on Surfaces, Thin Films, Nanostructures and Applications; 2006

Etch hillocks formation was studied experimentally and modeled using the Monte Carlo method for a Kossel crystal.  Simulations were used to explore possible formation mechanisms for the appearance of etch hillocks in two and three dimensions.  Comparison with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(100) are presented.