INVESTIGADORES
ALDAO celso Manuel
artículos
Título:
Dynamics of hillocks formation during wet etching
Autor/es:
M.P. SUÁREZ, D.A. MIRABELLA, Y C.M. ALDAO
Revista:
JOURNAL OF MOLECULAR CATALYSIS A-CHEMICAL
Editorial:
ELSEVIER SCIENCE BV
Referencias:
Año: 2008 vol. 281 p. 230 - 236
ISSN:
1381-1169
Resumen:
Etch hillocks formation was studied experimentally and modeled using the Monte Carlo method. Simulations were used to explore the consequences of site-dependent detachment probabilities on surface morphology for a one- and two-dimensional substrate models. Comparison with pyramidal etch hillocks that are regularly observed in anisotropic etching of Si(100) are presented. The steady-state morphologies are analyzed and the hillock size distributions determined. The mechanisms responsible for the steady state morphologies are described.
