Optical and electrical characterization of sol-gel synthesized PZT thin films on FTO glass substrates

DI MARCO, M. B.; IMHOFF, L.; BAROLIN, S.; ROLDÁN, M. V.; PELLEGRI, N. S.; STACHIOTTI, M. G.

Congreso; Pan American Ceramics Congress and Ferroelectrics Meeting of Americas (PACC-FMAs 2022); 2022

ACerS

In this work, lead zirconate titanate (PZT) thin films were fabricated onto transparent conductive substrates to investigate optical and electric properties.The precursor solution of PbZr0.52Ti0.48O3 was obtained by a modified sol-gel process based on the use of acetoin as a chelating agent, and then deposited onto fluorine-doped tin oxide (FTO) coated aluminoborosilicate glass substrates, by spin-coating. Both conventional furnace annealing (CFA) and rapid thermal annealing (RTA) were investigated to determine the optimum conditions for the fabrication of good-quality films, at temperatures ranging from 550°C to 650°C. Crack-free films with a single-phase perovskite structure were successfully fabricated. The measured direct bandgap of the PZT coatings was about 3.7eV and showed a slight increase with the increment of the annealing temperature. Preliminary results suggest that RTA at 650ºC is preferable to enhance the structural and electric properties of the material.