Design of a phase shift interferometer in the EUV for high precision metrology

M. G. CAPELUTO; M.C. MARCONI; C. C. IEMMI

Journal of Physics: Conference Series

IOP Publishing

Año: 2011 vol. 274 p. 1 - 9

1742-6588

We present the design of phase shift interferometer for the extreme ultraviolet (EUV) that will be used with the illumination provided by a table top Ne-like Ar laser emitting at 46.9 nm. We develop a model that computes the beam propagation trough the instrument, taking into account the influence of the fluctuations from shot-to-shot of the pulsed EUV laser on the retrieved wavefront.