3D Reconstruction of porous ceramic films by using FIB/SEM technique

LAURA BAQUÉ; FABIANO E. MONTORO

Bariloche

Congreso; 18º Congreso Internacional de Metalurgia y Materiales SAM-CONAMET 2018; 2018

Sociedad Argentina de Materiales (SAM) y Sociedad Chilena de Metalurgia y Materiales (SOCHIM)

3D FIB tomography is a powerful technique extensively used in the literature for reconstructing the  tridimensional  microstructure  of  different  kinds  of  samples.  It  is  not  until  recently  that  this technique becomes available to the Latin American scientific community with the purchase of some FIB/SEM instruments in Brazil and Argentina. This work describes the microstructure reconstruction of La0.4Sr0.6Co0.8Fe0.2O3-d (LSCFO) ceramic porous films by using 3D FIB tomography. Some aspects regarding  3D  FIB  tomography  of  particular  importance  to  porous  ceramic  films  such  as  sample preparation, data acquisition and data processing are detailed.