INVESTIGADORES
ISOLA Lucio Manuel
congresos y reuniones científicas
Título:
On the influence of metastable states and the behavior of the EEDF in the characterization of the negative glow of a N2-Ar discharge by OES
Autor/es:
ISOLA, LUCIO M.; LÓPEZ, MAIA M.; GOMÉZ, BERNARDO J.; GUERRA, VASCO
Lugar:
Santiago de Chile
Reunión:
Congreso; 15° International Congress on Plasma Physics; 2010
Resumen:
Optical emission spectroscopy (OES) is an essential
diagnostic technique in many plasma systems, such as those used for
surface treatments or fabrication of thin films. Despite the simplicity
of application of OES, its interpretation is not straightforward. In
particular, it requires the use of models, which due to the complexity
and variety of discharge conditions, have not yet been fully understood
[1]-[3].In addition, Langmuir probes have been widely used to
characterize plasmas. They allow the measurement of several parameters
of interest, such as the electron density and temperature, as well as
the determination of the electron energy distribution function (EEDF) by
numerical derivation of the characteristic V-I [4] or by probe-current
modulation [5].In this work, some second positive system bands in
the negative glow of an Ar-N2 plasma at a pressure of 2.5 Torr were
investigated both by OES and Langmuir probes, for different mixture
concentrations. The main purpose of this study was to verify how
metastable states and the behavior of the EEDF may infuence the
interpretation of OES data.