The spatial resolution of electron energy-loss and x-ray absorption fine structure

F. WANG; R.F. EGERTON; M. MALAC; R. MCLEOD; M.S. MORENO

JOURNAL OF APPLIED PHYSICS

American Institue of Physics

Año: 2008 vol. 104 p. 349061 - 349068

0021-8979

We have investigated the factors that determine the degree of localization of the informationobtainable from electron energy loss or x-ray absorption fine structure. Inelastic scattering of theexcited core electron limits the volume of specimen contributing to the backscattered intensity to a diameter in the range of 1–2 nm, dependent on the excited-electron energy and the composition and crystal structure of the sample. Phase cancellation between the backscattered waves further reduces the effective diameter that determines the observed fine structure to below 1 nm. Since the spatial resolution attainable by transmission electron microscopy can approach 0.2 nm or can even be below 0.1 nm (with aberration correction), we predict that delocalization arising from theexcited-electron range may limit the resolution of images based on changes in core-loss finestructure.