8 - Science and Technology of Integrated Nitride Piezoelectric/Ultrananocrystalline Diamond (UNCD™) Films for a New Generation of Biomedical MEMS Energy Generation, Drug Delivery, and Sensor Devices

MARTÍN ZALAZAR; ORLANDO AUCIELLO

Ultrananocrystalline Diamond Coatings for Next-Generation High-Tech and Medical Devices

Cambridge University Press

Año: 2022; p. 1 - 282

This chapter focus on describing the science and technology related to the use of UNCD films for fabricating microelectromechanical systems (MEMS) and nanoelectromechanical systems (NEMS) structures suitable for use in various devices for medical applications. Topics discussed include: 1) Design and fabrication of UNCD-based micro-turbines for chemical lab on a chip, 2) description of the materials science involved in the integration of UNCD films with dissimilar materials in film form, such as piezoelectric nitrides for development of piezo-actuated UNCD-based MEMS/NEMS, and integration with metal films for contacts, and biological matter (e.g., heart cells) for cell bit-induced mechanical deformation of piezo/UNCD cantilevers to generate power via the converse piezoelectric effect, whereby mechanical deformation of cantilevers is transduced into power generation, via mechanical displacement in opposite directions of + and - ions in the piezoelectric layer, thus voltage generation between two electrode layers sandwiching the piezoelectric layer for a new generation of biomedical energy generation devices and biosensors.