"A Predictive Tool in Micro- and Nano-engineering: Straightforward Estimation of Conformal Film Growth Efficiency”

A. DE VIRGILIIS; O. AZZARONI; R.C. SALVAREZZA; E.V. ALBANO

APPLIED PHYSICS LETTERS

Año: 2003 p. 1953 - 1955

0003-6951

It is shown that the conformal film growth (CFG) efficiency ( eCFG) of micro- and nanoscale cavities can be rationalized in terms of relevant physical and geometric parameters. Based on extensive numerical simulations and using the dynamic scaling theory of interface growth, it is concluded that the relevant quantity for the evaluation of eCFG is the so-called physical aspect ratio of the cavity. The theoretical predictions are in excellent agreement with recently reported experimental data for the super conformal filling of electrodeposited copper and chemically deposited silver in confined geometries [J. Electrochem. Soc. 147, 4524 (2000)], thus providing the basis of a tool to manage micro- and nano-engineering-related problems not completely resolved so far.