INVESTIGADORES
GUARNIERI Fabio Ariel
congresos y reuniones científicas
Título:
Diseño y fabricación de microinductor planar para microválvula activa para el tratamiento de glaucoma utilizando tecnología MEMS
Autor/es:
MARIA CECILIA PEREZ; FERNANDO L. SASSETTI; FABIO A GUARNIERI
Lugar:
La Plata
Reunión:
Congreso; II CONGRESO DE MICROELECTRÓNICA APLICADA 2011; 2011
Institución organizadora:
Centro de Técnicas Analógico-Digitales (CeTAD) Facultad de Ingeniería de la UNLP Universidad Nacional de La Plata
Resumen:
This paper presents the modeling, design and
characterization of planar microinductor, to be used in
telemetry systems that supply energy to miniaturized implants.
First, a model for the electrical characteristics of planar coils
will be discussed. Parasitic electrical effects that may become
important at AC-frequencies of several MHz are evaluated.
The fabrication process and electrical characterization of
planar microcoils will be described. Different configurations
of planar microinductor were made with the use of
micromachining technologies such as thin film deposition,
standard photolithography processes and electroplating. With
this technology small coils are relatively easy to fabricate
reproducibly. The parameters and performance of fabricated
inductor will be evaluated by electrical measurements.
Measurements show a good agreement between calculated and
measured values.
