congresos y reuniones científicas
Computational multi-field mechanics model of piezoelectric micro-resonator arrays
Isla de Margarita, Venezuela
Conferencia; CIMENICS 2008 - IX Congreso Internacional de Métodos Numéricos en Ingeniería y Ciencias Aplicadas; 2008
Institución organizadora:
Sociedad Venezolana de Métodos Numéricos en Ingenieria (SVMNI)
Micromechanical systems (MEMS) that employ active piezoelectric materials, typically in thin-film form, show promise for a variety of applications and are currently the subject of research in several laboratories. The development of increasingly complex devices demands sophisticated simulation techniques for design and optimization. MEMS devices typically involve multiple coupled energy domains and media that can be modeled using a set of partial differential equations, including spatial and time variables. In this work, a computational multi-field mechanics model of a micro-structure with piezoelectric actuation and piezoelectric sensing has been developed as a design tool for micro-resonators and micro-resonator arrays. The developed dynamic model of MEMS resonator array accounts for structural properties and electromechanical coupling effect through finite element analysis. The admittance model is derived by combining the linear piezoelectric constitutive equations with the modal transfer function of the resonator structure. The coupled model can be used to carry out sensitivity studies with respect to the following: (i) resonator beam thickness and length; (ii) influence of constant axial forces on the transverse vibrations of clamped-clamped micro-resonator arrays; (iii) geometry of the drive and sense electrodes; and (iv) imperfect boundary conditions due to mask imperfections and fabrication procedure. These modeling uncertainties come mainly from manufacturing tolerance, residual stresses, irregular surface topology, and material property variations, among others. The developed model has been validated by comparing with results available in the literature for single clamped-clamped resonators.