INVESTIGADORES
MACCHI Carlos Eugenio
artículos
Título:
Porosity of low-k Materials Studied by Slow Positron Beam
Autor/es:
R. S. BRUSA; C. MACCHI; S. MARIAZZI; G.P. KARWASZ
Revista:
ACTA PHYSICA POLONICA A
Editorial:
POLISH ACAD SCIENCES INST PHYSICS
Referencias:
Año: 2005 vol. 107 p. 702 - 711
ISSN:
0587-4246
Resumen:
The information about porosity in low-· materials obtainable by depth
pro¯ling with positron annihilation spectroscopy is reviewed. In particular
we focus on Doppler broadening spectroscopy and 2-3 ° ratio of positro-
nium measurements on SiOCH and amorphous carbon a-C:F:H thin ¯lms
produced by plasma enhanced chemical vapour deposition.
