Formation of and light emission from Si nanocrystals embedded in amorphous silicon oxides

D. COMEDI; O. H. Y. ZALLOUM; D. E. BLAKIE; J. WOJCIK; P. MASCHER

Cancun, México

Congreso; 210th Electrochemical Society Meeting; 2006

(Invited Article) The formation of Si-nc embedded in amorphous Si oxides promoted by thermal annealing of SiyO1-y films (y=0.34-0.45) fabricated by plasma enhanced chemical vapor deposition is examined by X-ray diffraction and electron microscopy. UV and synchrotron radiation excited photoluminescence from the obtained structures is also studied and its origin elucidated.