Optical and electrical characterization of sol-gel synthesized PZT thin films on FTO/aluminoborosilicate glass substrates

DI MARCO, M. BELÉN; IMHOFF, LUCIA; ROLDAN, M. VIRGINIA; BAROLIN, SEBASTIAN; STACHIOTTI, MARCELO

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS

SPRINGER

Lugar: Berlin; Año: 2023 vol. 34 p. 11711 - 11718

0957-4522

The deposition of lead zirconate titanate (PZT) thin films on transparent substrates is a relevantissue due to the increasing interest in PZT-based nanocomposites for photovoltaic applications.In this work, PZT thin films were deposited onto fluorine-doped tin oxide (FTO) coatedaluminoborosilicate glass (AG) substrates using a modified sol-gel route. AG substrates havethe advantage of high thermal resistance and low cost compared to quartz. Conventionalfurnace annealing (CFA) and rapid thermal annealing (RTA) processes were compared atdifferent temperatures to determine optimum conditions for the fabrication of good-qualityfilms. Crack-free films of ∼240 nm thickness were fully crystallized to the perovskite structurewith no segregation of secondary phases. The optical band gap slightly increases with theincrease of the annealing temperature. Au/PZT/FTO-AG capacitors exhibited good dielectricand ferroelectric properties. The best results were obtained for the films treated by CFA at 650oC, which display well-defined low-frequency hysteresis loops.