Elemental quantification by confocal micro-XRF

PÉREZ R. D.; SBARATO, V.; STOYTSCHEW V.; KANNGIESSER B.; SÁNCHEZ H.J.; PÉREZ C.A.; SOSA, C.

Campinas

Otro; Turno de medición; 2011

The confocal micro-XRF consists of x-ray lenses in the excitation as well as in the detection channel. In this configuration, a micro volume defined by the overlap of the foci of both x-ray lenses is analyzed. Scanning this micro volume through the sample can be performed a study in 1-3 dimensions. A depth profile analysis can be done by means of the scanning in the normal direction to the surface. Since this analysis is non-destructive, it has proved to be very useful for the study of paints in art, industry and biological investigations. The normal scanning is theoretically described by the spatial convolution of the sensitivity of the confocal setup and the x-ray fluorescence emission rate to the detector. Using this theoretical framework recently we developed a new algorithm to quantify multilayers samples by confocal setup. In the present paper, an application of the new algorithm over environmental filters is shown.