Mathematical Model for Evaluation of Surface Analysis Data by Total Refiection XRF

PÉREZ R.D.; SÁNCHEZ H.J.; RUBIO M.; PÉREZ C.A.

Bologna

Conferencia; European Conference on Energy Dispersive X-Ray Spectrometry 1998 (EDXRS 98); 1998

The general problem of an electromagnetic wavemoving through a stratified medium appears naturally in all the techniquesassociated with surface analysis by total refiection. It isa consequence of the theoretical models that describe thephysical processes involved in these techniques. This problem has beenextensively studied owing to its importance in optics. The nientionedtechniques are known as grazing incidence x-ray fluorescence (GIXRF) andgrazing exit x-ray fluorescence (GEXRF). In this work, the electric lield in astratifled medium was calculated using basic mathematical tools. The model usesa matrix approach lo take advantage of well-known mathematical results (such asHessenberg’s matrix properties). In this way, the model optimizes andfacilitates the data analysis in GIXRF measurenients and GEXRF experiments. The simplicity of the formalism admits approximations of the electric field,which allow a better understanding of the experimental data in both techniques.The model was used to analyze experimental data on silicon wafers with surfacelayers of dilferent elements, showing excellent results.