Characterization of amorphous carbon films grown by a vacuum arc discharge

M. FAZIO; E. HALAC; L. VACA; A. MARQUEZ

Congreso; SBPMat 2014; 2014

Sociedad Brasilera de Pesquisa de Materiales

Non hydrogenated amorphous carbon (a:C) films grown by a vacuum arc discharge were studied employing an original magnetic macroparticle filter configuration. The arc was produced between a 99% purity graphite cathode and the vacuum chamber that acts as the anode. The films were grown on 316L stainless steel and silicon substrates. The coatings were characterized for different settings of magnetic field values of the filter. The structure of the films was analysed by Raman spectroscopy and the morphology by scanning electron microscopy. The magnetic field values of the filter were optimized to grow amorphous carbon films with a deposition rate of 1nm/s.