Macroparticles and mechanical properties of Titanium Thin Films Obtained with a Cathodic Arc and Magnetic Concentrator

F. BERMEO; J. P. QUINTANA; A. KLEIMAN; A. MARQUEZ; H. SANCHEZ; JUAN M. GONZALEZ

Boca Raton, Florida

Congreso; 15 th LACCEI International Multi-Conference for Engineering, Education, and Technology; 2017

Ti films were obtained employing a cathodic arc with astraight magnetic filter. The films were characterized using,scanning electron microscopy, profilometry , nanoindentation and atribometer. The films were found to be roughness and with presenceof macroparticles,. The number of macroparticles, the film roughnessand the deposition rate were also analyzed, The deposition ratedepended on the axial position inside the duct, the number ofmacroparticles decreases with increasing axial position, The frictioncoefficient and wear rate are diminished when the substrate wasplaced farther from the cathode, more inside the magnetic duct