Optimization of a dc-vacuum arc to obtain TiO2 coatings in anatase phase

A. KLEIMAN; A. MÁRQUEZ; D. G. LAMAS

Mexico DF

Congreso; XI Latin American Workshop on Plasma Physics; 2005

In this work, the characterization of TiO2 coatings obtained with a dc cathodic arc is presented. The arc was run with a current of 100 A. Glass samples placed in front of the cathode on the chamber axis were exposed to the discharge during 5 min. The samples were mounted on a heater that allows heating the sample up to 400 ºC. The gas flow and the sample temperature were varied in order to find the optimum conditions for growing TiO2 in anatase phase. The coatings were analyzed by X-Ray Diffraction and Scanning Electron Microscopy. The results obtained by varying the gas flow in a range of 30 - 40 sccm and the sample temperature from 200 to 400 ºC are presented.