INVESTIGADORES
GOMEZ Bernardo Jose Armando
congresos y reuniones científicas
Título:
Oxygen ion implantation in Strontium Bismuth Tantalate thin films
Autor/es:
L.RICO; GOMEZ, BERNARDO JOSE A; M. STACHIOTTI; N. PELLEGRI; J. N. FEUGEAS; O. DE SANCTIS
Lugar:
Angra dos Reis, Brazil
Reunión:
Congreso; XII Latin American Congress of Surface Science and its Applications; 2005
Institución organizadora:
Claf
Resumen:
Strontium Bismuth Tantalate (SBT) ferroelectric thin films have attracted considerable attention
for the development of non-volatile ferroelectric random access memories (NV-FRAMs). These
films, however, have a critical problem: a high processing temperature (>700ºC ) is required for the
crystallization of the perovskite phase. The thermal evolution of the SBT films prepared by
Chemical Solution Deposition (CSD) techniques showed the formation of an intermediate oxygendeficient
fluorite phase at ~550ºC. The SBT perovskite phase crystallizes at higher temperatures.
To favor an earlier perovskite crystallization, SBT thin films were implanted with oxygen ions
pulses produced by a Plasma Focus (1 kJ). The samples were annealed at different temperatures in
oxygen atmosphere and characterized by GI-XRD and Atomic Force Microscopy techniques. It
was found that oxygen addition into the SBT structure promotes a better crystallization of the
perovskite phase.