A New Generation of X-ray Spectrometry UHV Instruments at the SR Facilities BESSY II, ELETTRA and SOLEIL

J. LUBECK; A. KARYDAS; JUAN JOSÉ LEANI; B. BECKHOFF

New York

Conferencia; International Conference on Synchrotron Radiation Instrumentation (SRI). 2015; 2015

National Synchrotron Light Source II

A novel type of ultra-high vacuum instrument for X-ray reflectometry and spectrometry related techniques for nanoanalytics by means of synchrotron radiation has been constructed and commissioned at BESSY II. This versatile instrument was developed by the PTB, Germany?s national metrology institute, and includes a 9-axis manipulator that allows for an independent alignment of the samples with respect to all degrees of freedom. In addition, a rotational and translational movement of several photodiodes as well as a translational movement of a beam geometry defining aperture system is provided. Thus, the new instrument enables various analytical techniques based on energy dispersive X-ray detectors such as reference-free X-Ray Fluorescence (XRF) analysis, total-reflection XRF, grazing-incidence XRF, in addition to optional X-Ray Reflectometry (XRR) measurements or polarization-dependent X-ray absorption fine structure analyses. Samples having a size of up to (100 x 100) mm² can be analyzed with respect to their mass deposition, elemental, spatial or species composition with respect to surface contamination, nanolayer composition and thickness, the depth profile of matrix elements or implants, nanoparticles or buried interfaces as well as the molecular orientation of bonds. Three technology transfer projects of adapted instruments have enhanced X-Ray Spectrometry (XRS) research activities within Europe at the synchrotron radiation facilities ELETTRA (IAEA) and SOLEIL (CEA/LNE-LNHB) as well as at the X-ray innovation laboratory BLiX (TU Berlin) where different laboratory sources are used. Here, smaller chamber requirements led PTB in cooperation with TU Berlin to develop a modified instrument equipped with a 7-axis manipulator: reduced freedom in the choice of experimental geometry (absence of out-of-SR-plane and reference-free XRS options) has been compensated by encoder-enhanced angular accuracy for GIXRF and XRR.