Feasibility Study of Difussion Effects at Interfaces in Layerd Thin Films by Depth Profiling using X-Ray Microbeam under Grazing-Exit Conditions

C. A. PÉREZ; H. J. SÁNCHEZ; E. AVENDANO; A. GOBBI; G. AZEVEDO

Campinas, Brasil

Congreso; RAU 18; 2008

Laboratorio Nacional de Luz Sincrotrón

Characterization techniques sensitive to the chemical and physical properties ofthe material surface are of key importance in modern science and technology. Wehave been explored in this opportunity the capabilities of surface analysis andspatial resolution of the micro x-ray fluorescence spectrometry technique undergrazing-exit conditions to inspect the feasibility of performing a nondestructivestudy of surfaces and interfaces in patterns of layered thin films samples. For thispurpose, layered materials of Au (20nm) and Cr (40nm) thin films were depositedby sputtering on a polished silicon substrate. The measurements were performedon samples as they were deposited and after a thermal treatment to 200oC and400oC in order to induce diffusion at the Cr/Au interfaces. A combined angularand spatial scanning across a perpendicular line between different patterns of layerthin films was performed to follow possible changes of the chemical depth profiling.Some results will be presented consisting of a comparison between the experimentaldata and theoretical calculation based on a multi-layered model in which a matrixapproach is used for the evaluation of the electromagnetic field in the stratifiedmedium.