Analysis of thin intermediate layers by confocal

PEREZ ROBERTO DANIEL; SáNCHEZ JORGE; M RUBIO; PEREZ CARLOS

X-RAY SPECTROMETRY

JOHN WILEY & SONS LTD

Lugar: Chichester; Año: 2011 vol. 40 p. 19 - 23

0049-8246

Recently, thecapabilitiesof themicro-X-rayfluorescence spectroscopy (ì-XRF)were expandedbymeansof a confocal geometry. It consists of X-ray lenses in the excitation as well as in the detection channelwhich defines a small probing volume. By moving an intermediate thin homogenous layer in the normal direction through this probing volume, information concerning the thickness and elemental composition can be obtained. Formultilayer samples the order of the layers in the stratified structure can be obtained. In this work, we apply a new quantification algorithm for confocal ì-XRF which can be useful in surface analysis. It is an iterative procedure valid for thin intermediate layers where the exponential attenuation of the X-ray beams cannot be approximated. The analytical expressions involved in the proposed quantification algorithm for confocalì-XRF were adapted from those used for quantification of intermediate thin layers by means of conventional XRF. In this way, some of the analytical processes applied in conventional XRF can be adapted to confocal ì-XRF. The new algorithm was applied to analyze by confocal ì-XRF a sample of a paint layer on a glass substrate. To test the precision of the proposed algorithm, the present results were compared with conventional XRF analysis. ì-XRF)were expandedbymeansof a confocal geometry. It consists of X-ray lenses in the excitation as well as in the detection channelwhich defines a small probing volume. By moving an intermediate thin homogenous layer in the normal direction through this probing volume, information concerning the thickness and elemental composition can be obtained. Formultilayer samples the order of the layers in the stratified structure can be obtained. In this work, we apply a new quantification algorithm for confocal ì-XRF which can be useful in surface analysis. It is an iterative procedure valid for thin intermediate layers where the exponential attenuation of the X-ray beams cannot be approximated. The analytical expressions involved in the proposed quantification algorithm for confocalì-XRF were adapted from those used for quantification of intermediate thin layers by means of conventional XRF. In this way, some of the analytical processes applied in conventional XRF can be adapted to confocal ì-XRF. The new algorithm was applied to analyze by confocal ì-XRF a sample of a paint layer on a glass substrate. To test the precision of the proposed algorithm, the present results were compared with conventional XRF analysis.