Polymer chip-integrable piezoelectric micropump with low backpressure dependence

CONDE, A.J.; BIANCHETTI, A; VEIRAS, F.E.; FEDERICO, A.; CABALEIRO, J.M.; DUFVA, M.; MADRID, ROSSANA E.; FRAIGI, L.

RSC advances

Royal Society of Chemistry

Año: 2015

We describe a piezoelectric micropump constructed in polymers with conventional machining methods. The micropump is self contained and can be built as an independent device or as an on chip module within laminated microfluidic chips. We demonstrate on-chip integrability by the fabrication and testing of an active micromixer with two pumps. Average flow rates from sub-ul min-1 to 300 ul min-1 can be obtained with low influence from the backpressure up to approximately 10 kPa. The micropump design allows potential use in low-cost disposable polymeric Lab on a Chip devices.