IFLP   13074
INSTITUTO DE FISICA LA PLATA
Unidad Ejecutora - UE
artículos
Título:
PAC study in the HfO2-SiO2 system
Autor/es:
CHAIN YAMIL; L. C. DAMONTE; S. FERRARI; E. M UÑOZ; C. RODRÍGUEZ TORRES; A.F. PASQUEVICH
Revista:
JOURNAL OF ALLOYS AND COMPOUNDS
Editorial:
Elsevier
Referencias:
Año: 2009
ISSN:
0925-8388
Resumen:
A high-k HfO2/SiO2 gate stack is taking the place of SiO2 as a gate dielectric in field effect transistors.
This fact makes the study of the solid-state reaction between these oxides very important. Nanostructure
characterization of a high-energy ball milled and post-annealed equimolar HfO2 and amorphous SiO2
This fact makes the study of the solid-state reaction between these oxides very important. Nanostructure
characterization of a high-energy ball milled and post-annealed equimolar HfO2 and amorphous SiO2
This fact makes the study of the solid-state reaction between these oxides very important. Nanostructure
characterization of a high-energy ball milled and post-annealed equimolar HfO2 and amorphous SiO2
k HfO2/SiO2 gate stack is taking the place of SiO2 as a gate dielectric in field effect transistors.
This fact makes the study of the solid-state reaction between these oxides very important. Nanostructure
characterization of a high-energy ball milled and post-annealed equimolar HfO2 and amorphous SiO22 and amorphous SiO2
powder mixture has been carried out by perturbed angular correlations (PAC) technique. The study was
complemented with X-ray diffraction and positron annihilation lifetime spectroscopy (PALS). The experimental
results revealed that the ball milling of equimolar mixtures increases the defects concentration
in hafnium oxide. No solid-state reaction occurred even after 8 h of milling. The formation of HfSiO44
(hafnon) was observed in the milled blends annealed at high temperatures.The PAC results of the milled
samples are compared with those obtained for pure m-ZrO2 subjected to high-energy ball milling and
with reported microstructure data for the system ZrO2SiO2.
with reported microstructure data for the system ZrO2SiO2.
with reported microstructure data for the system ZrO2SiO2.
m-ZrO2 subjected to high-energy ball milling and
with reported microstructure data for the system ZrO2SiO2.2SiO2.
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