IFLP   13074
INSTITUTO DE FISICA LA PLATA
Unidad Ejecutora - UE
artículos
Título:
Evolution of the quadrupole hyperfine interaction while milling a Si-HfO2? blend Original Research Article
Autor/es:
C.Y. CHAIN; S. FERRARI; L. C. DAMONTE; J.A. MARTINEZ; A.F. PASQUEVICH
Revista:
JOURNAL OF ALLOYS AND COMPOUNDS
Editorial:
ELSEVIER SCIENCE SA
Referencias:
Lugar: Amsterdam; Año: 2012 vol. 536 p. 50 - 54
ISSN:
0925-8388
Resumen:
As HfO2 appears as a good candidate to replace SiO2 in Si complementary metal-oxide-semiconductor
devices, a refined knowledge of the possible solid state reactions between Si and HfO2 is valuable. Being the
Perturbed Angular Correlation technique a very sensitive method to detect small changes in solid state, the
goal of this work is to follow the different stages that occur while ball milling a blend Si-HfO2 by inspecting
the hyperfine quadrupole interaction at Hf sites. The characterization is complemented by X-ray diffraction
analysis. For comparison, a similar study on pure m-HfO2 is carried out. The results seem to reveal a gradual
incorporation of Si in a tetragonal defective phase of hafnia with milling time. In addition, the formation of
precursor arrays of the HfSiO4 structure takes place. After an annealing at 1000ºC important amount of
crystalline hafnon appear