INQUIMAE 12526
INSTITUTO DE QUIMICA, FISICA DE LOS MATERIALES, MEDIOAMBIENTE Y ENERGIA
Unidad Ejecutora - UE
artículos
Título:
A comprehensive study of the influence of the stoichiometry on the physical properties of TiOx films prepared by ion beam deposition
Autor/es:
M. CLAUDIA MARCHI, SARA A. BILMES, C. T. M. RIBEIRO, E. A. OCHOA, M. KLEINKE, AND F. ALVAREZ
Revista:
JOURNAL OF APPLIED PHYSICS
Editorial:
AMER INST PHYSICS
Referencias:
Año: 2010
ISSN:
0021-8979
Resumen:
A comprehensive study of nonstoichiometry titanium oxide thin films TiOx, 0.3x2 preparedby ion beam deposition technique is reported. The physical properties of the material are studied byultraviolet and x-ray photoelectron, Raman, and Fourier transform infrared spectroscopy, and atomic force microscopy. An abrupt transition from metallic characteristics to a wide gap semiconductor is observed in a very narrow range of oxygen variation. Concomitantly with this change the crystal structure and morphology suffer remarkable physical properties modifications. This transformation is ascribed to surface-volume energy minimization due to the influence of oxygen determining the size of the TiO2 particles during coalescence
