Perfiles del sustrato y del recubrimiento en la caracterización de propiedades mecánicas en películas crecidas por arco catódico continuo

ARIEL KLEIMAN; JUAN PABLO QUINTANA; FRANKLIN BERMEO; ADRIANA MÁRQUEZ

Boca Raton

Conferencia; 15th LACCEI International Multi-Conference for Engineering, Education and Technology (LACCEI 2017); 2017

The Films were grown on Ti and Cu 316 with PVD techniques by continuous cathodic arc technique with magnetic concentrator for different sample conditions (floating, earth, polarized, temperature) and substrate-target distances variables; The surface morphology was observed with an optical microscope, the profiles were measured with a profilometer, Calotest and the hardness was measured with a NanoIndenter .The experimental results show that the radial profile distribution is variable with the axial position of the sample (target-substrate distance); the thicknesses may vary more than 50% in the radius of a sample; characterizing the hardness varies greatly, in the same sample when the samples do not have a uniform profile