INFINA (EX INFIP) 05545
INSTITUTO DE FISICA INTERDISCIPLINARIA Y APLICADA
Unidad Ejecutora - UE
artículos
Título:
Ion emission in a dc titanium cathodic arc operated with oxygen
Autor/es:
A. KLEIMAN; A. MÁRQUEZ; H. KELLY
Revista:
PHYSICA SCRIPTA
Editorial:
IOP
Referencias:
Año: 2008 vol. T131 p. 14005 - 14008
ISSN:
0031 8949
Resumen:
The ion emission and its correlation with the deposition rate in a dc titanium cathodic arc run in an oxygen ambient with a current of 115A has been investigated. The incoming O2 flow was varied between 1060 sccm, resulting in a working pressure of 0.110 Pa. The ion saturation current measurements were carried out with Langmuir probes located on the system axis at two distances, 20 and 30 cm, from the cathode. The deposition rates were determined by weighting the deposited mass on glass substrates located at the same positions as the probes. The ion density and ion energy were estimated for the different operation parameters. The sticking coefficient for titanium was estimated by using the deposition rate and the ion saturation current.
