INFINA (EX INFIP) 05545
INSTITUTO DE FISICA INTERDISCIPLINARIA Y APLICADA
Unidad Ejecutora - UE
artículos
Título:
Performance of a magnetic island macroparticle filter in a titanium vacuum arc
Autor/es:
A. KLEIMAN; A. MÁRQUEZ; R. BOXMAN
Revista:
PLASMA SOURCES SCIENCE & TECHNOLOGY (PRINT)
Editorial:
IOP Publishing Limited
Referencias:
Año: 2008 vol. 17 p. 15008 - 15014
ISSN:
0963-0252
Resumen:
A magnetic island filter for removing macroparticles during Ti vacuum arc deposition is characterized and optimized. The filter comprised three external coils, which generated a uniform magnetic field, and an internal coaxial coil with a cylindrical permanent magnet in its core, placed within the magnetic island, that generated a field in the opposite direction to the external field. The performance of the filter was studied for different fields configurations in which the external and the internal fields were varied in the range 0 5 mT. The plasma transport efficiency was analyzed by measuring the ion saturation current at different radial positions with probes. The ion transmission efficiency on the system axis was ~25%. Observation of the coating surface morphology with optical and scanning electronic microscopy determined that the macroparticles were effectively removed in a 12 cm diameter deposition region. For the best field configuration, the integrated ion current collected in that region was about 1.4% of the total arc current.
