Three-Dimensional Ion Distribution in a Filtered Vacuum Arc Discharge

KELLY, HÉCTOR; MARQUEZ, ADRIANA; PIRRERA, MÓNICA

AIP CONFERENCE PROCEEDINGS

American Institute of Physics

Año: 2006 vol. 875 p. 254 - 257

0094-243X

Three-dimensional measurements of the ion flux along the filter of a magnetically filtered d-c vacuum arc are presented. The device includes a metallic plasma-generating chamber with cooper electrodes coupled to a substrate chamber through a quarter-torus magnetic filter. The filtering magnetic field was high enough to magnetize the electrons but not the ions. The ion current distribution was studied using a multi-element Cu probes, placed at three different positions along the filter. The ion saturation current of each probe was measured by biasing the probe at –70V with respect the grounded anode. Preliminary results of the three dimensional ion flux distribution and the floating potential of the plasma as functions of the bias filter voltage and magnetic field intensity are reported.