INFINA (EX INFIP) 05545
INSTITUTO DE FISICA INTERDISCIPLINARIA Y APLICADA
Unidad Ejecutora - UE
artículos
Título:
Optimization of a DC Vacuum Arc to Obtain Anatase Phase TiO2 Coatings
Autor/es:
A. KLEIMAN; A. MÁRQUEZ; D. G. LAMAS
Revista:
AIP CONFERENCE PROCEEDINGS
Editorial:
AIP
Referencias:
Lugar: New York; Año: 2006 vol. 875 p. 223 - 226
ISSN:
0094-243X
Resumen:
In this work, the characterization of TiO2 coatings obtained with a dc cathodic arc is presented. The arc was run with a current of 100 A. Glass samples placed in front of the cathode on the chamber axis were exposed to the discharge during 5 min. The samples were mounted on a heater that allow to heat the sample up to 400ºC . The gas flux and the sample temperature were varied in order to find the optimum conditions for growing TiO2 in anatase phase. The coatings were analysed by X-Ray Diffraction and Scanning Electron Microscopy. The results obtained by varying the gas flux in a range of 10 - 40 sccm and the sample temperature from room temperature to 400ºC are presented.
