A polymer chip-integrable piezoelectric micropump with low backpressure dependence

CONDE, A. J.; BIANCHETTI, A.; VEIRAS, F. E.; FEDERICO, A.; CABALEIRO, J. M.; DUFVA, M.; MADRID, R. E.; FRAIGI, L.

RSC Advances

Royal Society of Chemistry

Lugar: Cambridge; Año: 2015 vol. 5 p. 49996 - 50000

We describe a piezoelectric micropump constructed in polymers with conventional machining methods. The micropump is self-contained and can be built as an independent device or as an on-chip module within laminated microfluidic chips. We demonstrate on-chip integrability by the fabrication and testing of an active micromixer with two pumps. Average flow rates from sub-ml/min to 300 ml/min can be obtained with low influence from the backpressure up to approximately 10 kPa. The micropump design allows potential use in low-cost disposable polymeric Lab on a Chip devices.